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Influence of hydrogen volumetric flow rate on temperature distribution in CVD reactor based on epi-growth of SiC.
Journal of Power Technologies, [S.l.], v. 95, n. 2, p. 119--125, july 2015.
ISSN 2083-4195.
Available at: <https://papers.itc.pw.edu.pl/index.php/JPT/article/view/604>. Date accessed: 03 dec. 2024.